Laser damage properties of Al2O3/MgF2 antireflection coatings on large, curved substrates at 248 nm
spiedigitallibrary.org
Laser damage properties of Al2O3/MgF2 antireflection coatings on large, curved substrates at 248 nm
As 248nm DUV lithography tools pursue resolution of smaller features, the transition towards higher numerical aperture optics in these tools is pushing the development of high-performance anti-reflection coatings on large-area, highly curved transmitting optics present in these systems. We present the results of one such effort to coat multi ...
Mar 4, 2022
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