The Evovac consists of five sources; two thermal evaporation sources, an electron beam source, and two sputtering sources (DC & RF). Deposition capabilities include a wide range of metals and oxides.

Growth temperature is a critical parameter determining the sheet carrier density of scandium aluminum nitride (ScAlN)-based heterostructures, grown using the sputtering technique. Gallium nitride (GaN ...

Transparent conductive thin films are crucial in various semiconductor devices, including solar cells, liquid crystal displays (LCDs), light-emitting diodes (LEDs), and sensors. Indium tin oxide (ITO) ...

There has been significant research into the practical uses of tin oxide (SnO 2), particularly in applications such as transparent electrodes, electromagnetic shielding, n-type thin-film transistor ...

Thin films continue to draw the focus of researchers. This article takes a current and closer look at their applications, variable deposition methods, and future uses. ‘Thin Film’ is a relative term ...

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